Mwepu oghere bụ otu n'ime ihe ndị na-akụ nkụ na-eme ka ụlọ ọrụ na-adakarị. Ọ ga-akpalite mmetụta-akụkụ gụnyere oke ike oriri, ogologo oge ihicha na ọdịda ngwaahịa. Nnwale njide nrụgide kwụ ọtọ bụ ụzọ nlele kacha dị irè maka nyocha mbupu na ebe nchekwa ihe ọkụkụ kwa ụbọchị, nke nwere ike nyochaa ọkwa ntapu n'ozuzu ya na-enweghị ihe nchọpụta pụrụ iche dị oke ọnụ.
Usoro ịrụ ọrụ zuru oke: mgbe mgbakọ zuru ezu ma ọ bụ nrụzi ogbe post-batch, mechie ọnụ ụzọ ụlọ nke ọma. Malite nfuli nfuli ma kwatuo ụlọ ala ka ịche oghere kacha. Mgbe ị nwetachara uru oghere, mechie nfuli nfuli niile ma mechie valvụ oghere ka ikewapụ nkeji ikuku. Malite usoro iheomume wee dekọọ uru nrụgide-ebili n'ime ụlọ n'ime oge a kapịrị ọnụ.
Usoro nnabata dị iche iche maka nkeji nha dị iche iche. Ntụaka n'ozuzu maka nri-ọkwa ụlọ ọrụ friza nkụ: n'okpuru ụlọ-okpomọkụ ọnọdụ, mgbe kewapụrụ agụụ otu, mgbali-ebili Ihe na-erughị ma ọ bụ hà 15Pa n'ime 30 nkeji pụtara magburu onwe arụmọrụ; 15-40Pa mgbali elu dara n'ime oke anabatara; ịrị elu nrụgide n'elu 40Pa na-egosi nhịahụ doro anya na a ga-eme nyocha ntụpọ.
Focus on frequent leak‑points: ① chamber‑door silicone sealing strip and sealing contact surface, check for debris, scratches, aging & cracks; ② gaskets of each flange joint; ③ vacuum pipe connectors; ④ sealing rings of vacuum valves; ⑤ observation window and sensor mounting ports on chamber wall.
Ndụmọdụ: Emela nnwale njide nrụgide n'ọnụ ụlọ dị ọkụ ozugbo mmepụtachara. Chere ruo mgbe ọnụ ụlọ dara nke ọma ruo n'ime ụlọ, n'ihi na mgbasawanye okpomọkụ na mkpirisi ga-agbagọ n'agụmahụ nrụgide. Zere ule n'okpuru ifufe siri ike ma ọ bụ mgbanwe ihu igwe dị nkọ nke na-egbochi nsonaazụ ule.
Nnwale njide nrụgide nwere ike ikpebi ma ọnyà n'ozuzu ọ dị, ma enweghị ike ịkọwapụta ọnọdụ nkwụsịtụ. Ọ bụrụ na nsonaazụ nrụgide ada ada, were nchọpụta nrịba mmiri iji chọta ebe mgbapụta. Tinyegharịa ule njide nrụgide ka emezichara iji kwado index tozuru oke. Patrol-njide nrụgide mgbe niile na-enyere aka ịchọpụta ịka nká ezoro ezo - ihe ize ndụ nke itinye akara tupu oge eruo ma gbochie ndakpọ mberede n'oge mmepụta.
